Deep dry etching process development for photonic crystals in InP-based planar waveguides

van der Heijden, RW; Andriesse, MSP; Carlström, CF; van der Drift, E.W.J.M.; Geluk, EJ; Karouta, F; Nouwens, P; Oei, YS; de Vries, T; Salemink, H.W.M.

Deep dry etching process development for photonic crystals in InP-based planar waveguides

Conference paper (2004)

Authors

RW van der Heijden External organisation

MSP Andriesse QN/Kavli Nanolab Delft -

CF Carlström External organisation

E.W.J.M. van der Drift QN/Kavli Nanolab Delft -

EJ Geluk Electronic Components, Technology and Materials -

F Karouta External organisation

P Nouwens External organisation

YS Oei External organisation

T de Vries External organisation

H.W.M. Salemink QN/Afdelingsbureau

Research Group

QN/Kavli Nanolab Delft () (TU Delft)

Elektrotechniek Techniek

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http://resolver.tudelft.nl/uuid:ae72b032-2c20-4295-953e-80e59b89a63d

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Published Date

2004

Language

Undefined/Unknown

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Kavli Nanolab Delft