7 records found
1
Silicon laser annealing by a two-pulse laser system with variable pulse offsets
Double laser annealing of implanted silicon by using laser pulse offsets
Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes
Characterization of waferstepper and process related front- to backwafer overlay errors in bulk micro machining using electrical overlay test structures
Characterization of front to backwafer bulk micromachining using electrical overlay test structures
Silicon Drift Detectors for the Detection of X-rays and gamma-rays