A Bourtsev | TU Delft Repository

A

A Bourtsev

Conference paper (2)

Journal article (2)

4 records found

1

Near-ideal implanted shallow-junction diode formation by excimer laser annealing

Conference paper (2005) - V Gonda (author) , A Bourtsev (author) , T.L.M. Scholtes (author) , L. K. Nanver (author)

Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes

Journal article (2004) - A Bourtsev (author) , H Schut (author) , L. K. Nanver (author) , A van Veen (author) , J Slabbekoorn (author) , T.L.M. Scholtes (author)

Surface roughness of contact windows for shallow junction formation

Conference paper (2004) - V Gonda (author) , A Bourtsev (author) , T.L.M. Scholtes (author) , L. K. Nanver (author)

Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes

Journal article (2004) - A Bourtsev (author) , H Schut (author) , L. K. Nanver (author) , A van Veen (author) , J Slabbekoorn (author) , T.L.M. Scholtes (author)