Near-ideal implanted shallow-junction diode formation by excimer laser annealing

Gonda, V; Bourtsev, A; Scholtes, T.L.M.; Nanver, L. K.

Near-ideal implanted shallow-junction diode formation by excimer laser annealing

Conference paper (2005)

Authors

V Gonda Electronic Components, Technology and Materials

A Bourtsev Electronic Components, Technology and Materials

T.L.M. Scholtes Electronic Components, Technology and Materials

L. K. Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2005

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Research Group

Electronic Components, Technology and Materials

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