Silicon laser annealing by a two-pulse laser system with variable pulse offsets

Gonda, V; Slabbekoorn, J; Nanver, L.K.

Silicon laser annealing by a two-pulse laser system with variable pulse offsets

Conference paper (2007)

Authors

V Gonda Electronic Components, Technology and Materials

J Slabbekoorn Electronic Components, Technology and Materials

L.K. Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek

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Published Date

2007

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Research Group

Electronic Components, Technology and Materials

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