8 records found
1
Texture formation in sputter-deposited (Nb0.7,Ti0.3)N thin films
Reactive magnetron sputter-deposition of NbN and (Nb, Ti)N films related to sputtering source characterization and optimization.
Superconducting Transition Metal Nitride films for THz SIS Mixers.
Properties of (Nb0.35, Ti0.15)-xN1-x thin films deposited on silicon wafers at ambient substrate temperature.
Properties of (Nb0.35, Ti0.15)xNi1-x thin films deposited on silicon wafers at ambient substrate temperature.
Source optimization for magnetron sputter deposition of Nb TiN tuning elements for SIS THz detectors.
Properties of DC magnetron sputtered Nb and NbN films for different source conditions.
Optimization of RF- and DC sputtered Nb TiN films for integration with Nb-based SIS junction.