Source optimization for magnetron sputter deposition of Nb TiN tuning elements for SIS THz detectors.

Iossad, N; Jackson, BD; Ferro, F; Gao, JR; Polyakov, SN; Dimitriev, P; Klapwijk, T.M.

Source optimization for magnetron sputter deposition of Nb TiN tuning elements for SIS THz detectors.

Journal article (1999)

Authors

N Iossad QN/Fysics of NanoElectronics

BD Jackson QN/Fysics of NanoElectronics

F Ferro External organisation

JR Gao QN/Fysics of NanoElectronics

SN Polyakov External organisation

P Dimitriev External organisation

T.M. Klapwijk QN/Fysics of NanoElectronics

Research Group

QN/Fysics of NanoElectronics

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Published Date

1999

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Research Group

QN/Fysics of NanoElectronics