Z Xiao | TU Delft Repository

Z

Z Xiao

Conference paper (2)

Journal article (2)

Report (3)

7 records found

1

Bulk micromachined electrostatic RMS-to-DC converter

Journal article (2001) - G de Graaf (author), G. Graaf (author), G. de De Graaf (author), G. De Graaf (author), Ger De Graaf (author), G. de Graaf (author), G. de de Graaf (author), G. de Graaf (author), Ger de Graaf (author), Ger Graaf (author), G Graaf (author), G De Graaf (author), M. Bartek (author), M Bartek (author), Z Xiao (author), CJ Mullem (author), Reinoud F. Wolfenbuttel (author), R.F. Wolffenbuttel (author), Reinoud F. Wolffenbuttel (author), R.F. Wolfenbuttel (author), RF Wolffenbuttel (author), Reinoud Wolffenbuttel (author), Reinoud Wolfenbuttel (author), RF Wolfenbuttel (author)

Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication

Conference paper (2000) - M Bartek (author), M. Bartek (author), Z Xiao (author), CJ van Mullem (author), RF Wolffenbuttel (author), RF Wolfenbuttel (author), R.F. Wolffenbuttel (author), R.F. Wolfenbuttel (author), Reinoud Wolfenbuttel (author), Reinoud Wolffenbuttel (author), Reinoud F. Wolfenbuttel (author), Reinoud F. Wolffenbuttel (author)

Design of membrane structures for RMS converter application

Report (1999) - Z Xiao (author)

Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

Journal article (1999) - Z Xiao (author), Min Chen (author), Guoying Wu (author), Changde Zhao (author), Dacheng Zhang (author), Yilong Hao (author), Guobing Zhang (author), ZH Li (author)

Study of SOI technology for RMS converter application

Report (1999) - Z Xiao (author)

Optimized design of RMS converter with electro-static force based on ANSYS simulation

Report (1999) - Z Xiao (author)

Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

Conference paper (1999) - Z Xiao (author), Guoying Wu (author), Min Chen (author), Changde Zhao (author), Dacheng Zhang (author), Yilong Hao (author), ZH Li (author)