Z Xiao | TU Delft Repository

Z

Z Xiao

Conference paper (2)

Journal article (2)

Report (3)

7 records found

1

Bulk micromachined electrostatic RMS-to-DC converter

Journal article (2001) - G. de Graaf (author), M. Bartek (author), Z Xiao (author), CJ Mullem (author), R.F. Wolffenbuttel (author)

Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication

Conference paper (2000) - M. Bartek (author), Z Xiao (author), CJ van Mullem (author), R.F. Wolffenbuttel (author)

Study of SOI technology for RMS converter application

Report (1999) - Z Xiao (author)

Design of membrane structures for RMS converter application

Report (1999) - Z Xiao (author)

Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

Conference paper (1999) - Z Xiao (author), Guoying Wu (author), Min Chen (author), Changde Zhao (author), Dacheng Zhang (author), Yilong Hao (author), ZH Li (author)

Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

Journal article (1999) - Z Xiao (author), Min Chen (author), Guoying Wu (author), Changde Zhao (author), Dacheng Zhang (author), Yilong Hao (author), Guobing Zhang (author), ZH Li (author)

Optimized design of RMS converter with electro-static force based on ANSYS simulation

Report (1999) - Z Xiao (author)