Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication

Conference paper (2000)

Authors

M. Bartek Old - EWI Ch. Integrated Sensing Devices
Z Xiao Old - EWI Sect. ECTM
CJ van Mullem External organisation
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

2000

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices