Changde Zhao | TU Delft Repository

CZ

Changde Zhao

Conference paper (1)

Journal article (1)

2 records found

1

Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

Conference paper (1999) - Z Xiao (author), Guoying Wu (author), Min Chen (author), Changde Zhao (author), Dacheng Zhang (author), Yilong Hao (author), ZH Li (author)

Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

Journal article (1999) - Z Xiao (author), Min Chen (author), Guoying Wu (author), Changde Zhao (author), Dacheng Zhang (author), Yilong Hao (author), Guobing Zhang (author), ZH Li (author)