Dacheng Zhang | TU Delft Repository

DZ

Dacheng Zhang

Conference paper (1)

Journal article (1)

2 records found

1

Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

Journal article (1999) - Z Xiao (author), Min Chen (author), Guoying Wu (author), Changde Zhao (author), Dacheng Zhang (author), Yilong Hao (author), Guobing Zhang (author), ZH Li (author)

Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

Conference paper (1999) - Z Xiao (author), Guoying Wu (author), Min Chen (author), Changde Zhao (author), Dacheng Zhang (author), Yilong Hao (author), ZH Li (author)