Silicon micro-accelerometer with mg resolution, high linearity and large frequency bandwidth fabricated with two mask bulk process

Journal article (1999)

Authors

Z Xiao Old - EWI Sect. ECTM
Min Chen External organisation
Guoying Wu External organisation
Changde Zhao External organisation
Dacheng Zhang External organisation
Yilong Hao External organisation
Guobing Zhang External organisation
ZH Li External organisation
Research Group
Old - EWI Sect. ECTM
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Published Date

1999

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM