Increasingly stringent performance requirements for motion systems necessitate explicit control of the flexible dynamic behavior. The aim of this paper is to present an approach to identify spatio-temporal models of overactuated mechatronic systems with a limited number of spatially distributed sensors. The proposed approach exploits the modal modeling framework and exploits the symmetry in modal models to enhance the spatial resolution of the identified spatially-sampled modal models. Spatio-temporal models are identified by updating prior finite element method-based models based on the identified extended modal models. The experimental results illustrate the effectiveness of the proposed approach for the identification of complex position-dependent mechanical systems.

@en

Next-generation deformable mirrors are envisaged to exhibit low-frequency flexible dynamics and to contain a large number of spatially distributed actuators due to increasingly stringent performance requirements. The increasingly complex system characteristics necessitate identifying the flexible dynamic behavior for design validation and next-generation control. The aim of this paper is to develop a unified approach for the identification of mechanical systems with a large number of spatially distributed actuators and a limited number of sensors. A frequency domain-based approach using local modeling techniques is developed. The modal modeling framework is employed to analyze the design and create outputs that were not measured. The proposed approach is applied to an experimental deformable mirror case study that illustrates the effectiveness of the proposed approach.

@en

Fine positioning stages based on piezoceramic materials have found widespread success in various applications due to their attractive features. However, the inherent hard nonlinear behavior of piezoelectric actuators complicates modeling, control, and synchronization processes. In this study, adopting an input–output perspective, we propose and experimentally verify a model-free control and synchronization technique for these stages. Specifically, our approach introduces a model-free trajectory generator that adjusts the desired trajectory using position measurement data to minimize tracking errors. We validate this technique using a representative precision motion system, consisting of a planner stage and a uni-axial fine stage, under step-and-scan trajectories commonly employed in wafer scanners. Remarkably, despite its simplicity, the proposed design procedure can be seamlessly extended to other robotics and automation applications.@en

Identifying structured discrete-time linear time/parameter-varying (LPV) input-output (IO) models with global stability guarantees is a challenging problem since stability for such models is only implicitly defined through the solution of matrix inequalities (MI) in terms of the model's coefficient functions. In this letter, a structured linear IO model class is developed that results in a quadratically stable model for any choice of coefficient functions, enabling identification using standard optimization routines while guaranteeing stability. This is achieved through transforming the MI-based stability constraints in a necessary and sufficient manner, such that for any choice of transformed coefficient functions the MIs are satisfied. The developed stable LPV-IO model is employed in simulation to estimate the parameter-varying damping of mass-damper-spring system with stability guarantees, while a standard LPV-IO model results in an unstable estimate.

@en

Flexible dynamics in motion systems lead to inherent spatio-temporal system behavior. The aim of this paper is to develop an unified approach for the identification of modal models of spatio-temporal overactuated systems. The approach exploits the modal modeling framework and the overactuated setting to enhance the estimation of the spatial system behavior. The proposed approach is applied in an experimental case study. The case study considers an experimental overactuated stage and illustrates the effectiveness of the proposed approach.

@en

The performance of a feedforward controller is primarily determined by the extent to which it can capture the relevant dynamics of a system. The aim of this paper is to develop an input-output linear parameter-varying (LPV) feedforward parameterization and a corresponding data-driven estimation method in which the dependency of the coefficients on the scheduling signal are learned by a neural network. The use of a neural network enables the parameterization to compensate a wide class of constant relative degree LPV systems. Efficient optimization of the neural-network-based controller is achieved through a Levenberg-Marquardt approach with analytic gradients and a pseudolinear approach generalizing Sanathanan-Koerner to the LPV case. The performance of the developed feedforward learning method is validated in a simulation study of an LPV system showing excellent performance.

@en

Tracking performance of physical-model-based feedforward control for interventional X-ray systems is limited by hard-to-model parasitic nonlinear dynamics, such as cable forces and nonlinear friction. In this paper, these nonlinear dynamics are compensated using a physics-guided neural network (PGNN), consisting of a physical model, embedding prior knowledge of the dynamics, in parallel with a neural network to learn hard-to-model dynamics. To ensure that the neural network learns only unmodelled effects, the neural network output in the subspace spanned by the physical model is regularized via an orthogonal projection-based approach, resulting in complementary physical model and neural network contributions. The PGNN feedforward controller reduces the tracking error of an interventional X-ray system by a factor of 5 compared to an optimally tuned physical model, successfully compensating the unmodeled parasitic dynamics.

@en

An increasing trend in the use of neural networks in control systems is being observed. The aim of this paper is to reveal that the straightforward application of learning neural network feedforward controllers with closed-loop data may introduce parameter inconsistency that degrades control performance, and to provide a solution. The proposed method employs instrumental variables to ensure consistent parameter estimates. A nonlinear system example reveals that the developed instrumental variable neural network (IVNN) approach asymptotically recovers the optimal solution, while pre-existing approaches are shown to lead to inconsistent estimates.

@en

A reset integral controller is discussed that induces improved low-frequency disturbance rejection properties under double integrator control without giving the unwanted increase of overshoot otherwise resulting from adding an extra linear integrator. To guarantee closed-loop stability, a (conditional) reset condition is used that restricts the input-output behavior of the dynamic reset element to a [0,α]-sector with α a positive (finite) gain. As a result, stability can be guaranteed on the basis of a circle criterion-like argument and checked through (measured) frequency response data. Both stability and performance of the control design will be discussed via measurement results obtained from a wafer stage system of an industrial wafer scanner.

@en

In high-precision motion systems, set-point tracking often comes with the problem of overshoot, hence poor settling behavior. To avoid overshoot, PD control (thus without using an integrator) is preferred over PID control. However, PD control gives rise to steady-state error in view of the constant disturbances acting on the system. To deal with both overshoot and steady-state error, a sliding mode controller with saturated integrator is studied. For large servo signals the controller is switched to PD mode as to constrain the integrator buffer and therefore the overshoot. For small servo signals the controller switches to PID mode as to avoid steady-state error. The tuning of the switching parameters will be done automatically with the aim to optimize the settling behavior. The sliding mode controller will be tested on a high-precision motion system.@en