Identification of an overactuated deformable mirror system with unmeasured outputs

Journal article (2024)

Authors

Paul Tacx Eindhoven University of Technology
Roel Habraken Eindhoven University of Technology, TNO
Gert Witvoet TNO, Eindhoven University of Technology
Marcel Heertjes Eindhoven University of Technology, ASML
T.A.E. Oomen Eindhoven University of Technology, Team Jan-Willem van Wingerden - Mechanical, Maritime and Materials Engineering
Research Group
Team Jan-Willem van Wingerden (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2024 Paul Tacx, Roel Habraken, Gert Witvoet, Marcel Heertjes, T.A.E. Oomen
DOI: https://doi.org/10.1016/j.mechatronics.2024.103158
More Info
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Published Date

2024

Language

English

Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Research Group

Team Jan-Willem van Wingerden

Abstract

Next-generation deformable mirrors are envisaged to exhibit low-frequency flexible dynamics and to contain a large number of spatially distributed actuators due to increasingly stringent performance requirements. The increasingly complex system characteristics necessitate identifying the flexible dynamic behavior for design validation and next-generation control. The aim of this paper is to develop a unified approach for the identification of mechanical systems with a large number of spatially distributed actuators and a limited number of sensors. A frequency domain-based approach using local modeling techniques is developed. The modal modeling framework is employed to analyze the design and create outputs that were not measured. The proposed approach is applied to an experimental deformable mirror case study that illustrates the effectiveness of the proposed approach.