Self-tuning in sliding mode control of high-precision motion systems

Heertjes, M. F.; Vardar, Y.

Self-tuning in sliding mode control of high-precision motion systems

Conference paper (2013)

Authors

M. F. Heertjes ASML

Y. Vardar Eindhoven University of Technology

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Https://repository.tudelft.nl/Thing_1ec8a7d6-3881-4ad0-a7bb-1ae994546d11 Motion systems Sliding mode control Self-tuning Machine-in-the-loop optimization Wafer scanners

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Published Date

2013

Language

English

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Abstract

In high-precision motion systems, set-point tracking often comes with the problem of overshoot, hence poor settling behavior. To avoid overshoot, PD control (thus without using an integrator) is preferred over PID control. However, PD control gives rise to steady-state error in view of the constant disturbances acting on the system. To deal with both overshoot and steady-state error, a sliding mode controller with saturated integrator is studied. For large servo signals the controller is switched to PD mode as to constrain the integrator buffer and therefore the overshoot. For small servo signals the controller switches to PID mode as to avoid steady-state error. The tuning of the switching parameters will be done automatically with the aim to optimize the settling behavior. The sliding mode controller will be tested on a high-precision motion system.