Kinetic inductance detectors (KIDs) are superconducting energy-resolving detectors, sensitive to single photons from the near-infrared to ultraviolet. We study a hybrid KID design consisting of a β-phase tantalum (β-Ta) inductor and a Nb-Ti-N interdigitated capacitor. The devices show an average intrinsic quality factor Qi of 4.3×105±1.3×105. To increase the power captured by the light-sensitive inductor, we 3D print an array of 150×150μm resin microlenses on the backside of the sapphire substrate. The shape deviation between design and printed lenses is smaller than 1μm, and the alignment accuracy of this process is δx=+5.8±0.5μm and δy=+8.3±3.3μm. We measure a resolving power for 1545-402 nm that is limited to 4.9 by saturation in the KID's phase response. We can model the saturation in the phase response with the evolution of the number of quasiparticles generated by a photon event. An alternative coordinate system that has a linear response raises the resolving power to 5.9 at 402 nm. We verify the measured resolving power with a two-line measurement using a laser source and a monochromator. We discuss several improvements that can be made to the devices on a route towards KID arrays with high resolving powers.

@en

Superconducting resonators and transmission lines are fundamental building blocks of integrated circuits for millimeter-submillimeter astronomy. Accurate simulation of radiation loss from the circuit is crucial for the design of these circuits because radiation loss increases with frequency, and can thereby deteriorate the system performance. Here we show a stratification for a 2.5-dimensional method-of-moment simulator Sonnet EM that enables accurate simulations of the radiative resonant behavior of submillimeter-wave coplanar resonators and straight coplanar waveguides (CPWs). The Sonnet simulation agrees well with the measurement of the transmission through a coplanar resonant filter at 374.6 GHz. Our Sonnet stratification utilizes artificial lossy layers below the lossless substrate to absorb the radiation, and we use co-calibrated internal ports for de-embedding. With this type of stratification, Sonnet can be used to model superconducting millimeter-submillimeter wave circuits even when radiation loss is a potential concern.

@en

A focal plane array of extended-hemispherical silicon lenses coupled to aluminum coplanar-waveguide (CPW) Microwave Kinetic Inductance Detectors (MKIDs) has been designed to operate at 7.8 THz. Low-dispersive leaky-wave radiation has been used to efficiently illuminate the antireflection-coated lenses. To minimize the radiation loss from the antenna feeding lines at these high frequencies, the CPWs have been miniaturized and placed on a dielectric membrane. A test device has been fabricated and its experimental characterization in terms of sensitivity, optical coupling, and beam patterns is ongoing.@en

Superconducting circuit elements used in millimeter-submillimeter (mm-submm) astronomy would greatly benefit from deposited dielectrics with small dielectric loss and noise. This will enable the use of multilayer circuit elements and thereby increase the efficiency of mm-submm filters and allow for a miniaturization of microwave kinetic inductance detectors (MKIDs). Amorphous dielectrics introduce excess loss and noise compared with their crystalline counterparts, due to two-level system defects of unknown microscopic origin. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C, and 350°C. The measured void volume fraction, hydrogen content, microstructure parameter, and bond-Angle disorder are negatively correlated with the substrate temperature. All three films have a loss tangent below 10-5 for a resonator energy of 105 photons, at 120 mK and 4 to 7 GHz. This makes these films promising for MKIDs and on-chip mm-submm filters.

@en

A superconducting microstrip half-wavelength resonator is proposed as a suitable band-pass filter for broadband moderate spectral resolution spectroscopy for terahertz (THz) astronomy. The proposed filter geometry has a free spectral range of an octave of bandwidth without introducing spurious resonances, reaches a high coupling efficiency in the pass-band and shows very high rejection in the stop-band to minimize reflections and cross-talk with other filters. A spectrally sparse prototype filter-bank in the band 300400 GHz has been developed employing these filters as well as an equivalent circuit model to anticipate systematic errors. The fabricated chip has been characterized in terms of frequency response, reporting an average peak coupling efficiency of 27% with an average spectral resolution of 940.

@en

We present a lab-on-chip technique to measure the very low losses in superconducting transmission lines at (sub-) mm wavelengths. The chips consist of a 100 nm-thick NbTiN Co-planar Waveguide (CPW) Fabry–Pérot (FP) resonator, coupled, on one side, to an antenna and, on the other side, to a Microwave Kinetic Inductance detector. Using a single frequency radiation source allows us to measure the frequency response of the FP around 350 GHz and deduce its losses. We show that the loss is dominated by radiation loss inside the CPW line that forms the FP and that it decreases with the decreasing linewidth and increasing kinetic inductance as expected. The results can be quantitatively understood using SONNET simulations. The lowest loss is observed for a CPW with a total width of 6 μm and corresponds to a Q-factor of ≈15 000.@en

We present the design, fabrication, and characterization of a broadband leaky lens antenna for broadband, spectroscopic imaging applications. The antenna is designed for operation in the 300-900 GHz band. We integrate the antenna directly into an Al-NbTiN hybrid microwave kinetic inductance detector (MKID) to measure the beam pattern and absolute coupling efficiency at three frequency bands centered around 350, 650, and 850 GHz, covering the full antenna band. We find an aperture efficiency \eta _{ap} \approx 0.4 over the whole frequency band, limited by lens reflections. We find a good match with simulations for both the patterns and efficiency, demonstrating a 1:3 bandwidth in the submillimeter wavelength range for future on-chip spectrometers.

@en

With increasing array size, it is increasingly important to control stray radiation inside the detector chips themselves. We demonstrate this effect with focal plane arrays of absorber coupled Lumped Element microwave Kinetic Inductance Detectors (LEKIDs) and lens-antenna coupled distributed quarter wavelength Microwave Kinetic Inductance Detectors (MKIDs). In these arrays the response from a point source at the pixel position is at a similar level to the stray response integrated over the entire chip area. For the antenna coupled arrays, we show that this effect can be suppressed by incorporating an on-chip stray light absorber. A similar method should be possible with the LEKID array, especially when they are lens coupled.

@en