MJJ Wieland | TU Delft Repository

M

MJJ Wieland

Conference paper (4)

Journal article (5)

9 records found

1

Fabrication and characterization of silicon carbide field-emitter array

Journal article (2004) - A van Zuuk (author), C.Th.H. Heerkens (author), AHV van Veen (author), T.F. Teepen (author), MJJ Wieland (author), O Gröning (author), P. Kruit (author)

Optimum dose for shot noise limited CD uniformity in E-beam lithography

Journal article (2004) - P. Kruit (author), S. Steenbrink (author), R. Jager (author), MJJ Wieland (author)

Field emission photocathode array for high throughput lithography.

Conference paper (2001) - AHV van Veen (author), BJ Kampherbeek (author), MJJ Wieland (author), P. Kruit (author)

Field Emission Photocathode Arrray for multibeam electron lithography.

Journal article (2001) - MJJ Wieland (author), BJ Kampherbeek (author), P Addessi (author), P. Kruit (author)

An experimental setup to test the MAPPER electron lithography concept.

Journal article (2000) - BJ Kampherbeek (author), MJJ Wieland (author), A. Zuuk (author), P. Kruit (author)

Resolution of the multiple aperture pixel by pixel enhancement of resolution electron lithography concept.

Journal article (2000) - BJ Kampherbeek (author), MJJ Wieland (author), P. Kruit (author)

An experimental setup to test the Mapper electron lithography concept.

Conference paper (1999) - BJ Kampherbeek (author), MJJ Wieland (author), A. Zuuk (author), P. Kruit (author)

An experimental setup to prove the MAPPER electron lithography concept.

Conference paper (1999) - BJ Kampherbeek (author), MJJ Wieland (author), P. Kruit (author)

An experimental setup to proof the MAPPER electron lithography concept.

Conference paper (1999) - BJ Kampherbeek (author), MJJ Wieland (author), P. Kruit (author)