M

MJJ Wieland

9 records found

Authored

Optimum dose for shot noise limited CD uniformity in E-beam lithography
Journal article (2004) - P. Kruit, S. Steenbrink, R. Jager, MJJ Wieland

Fabrication and characterization of silicon carbide field-emitter array

Field Emission Photocathode Arrray for multibeam electron lithography.
Journal article (2001) - MJJ Wieland, BJ Kampherbeek, P Addessi, P. Kruit

Field emission photocathode array for high throughput lithography.
Conference paper (2001) - AHV van Veen, BJ Kampherbeek, MJJ Wieland, P. Kruit

Resolution of the multiple aperture pixel by pixel enhancement of resolution electron lithography concept.
Journal article (2000) - BJ Kampherbeek, MJJ Wieland, P. Kruit

An experimental setup to test the MAPPER electron lithography concept.
Journal article (2000) - BJ Kampherbeek, MJJ Wieland, A. Zuuk, P. Kruit

An experimental setup to proof the MAPPER electron lithography concept.
Conference paper (1999) - BJ Kampherbeek, MJJ Wieland, P. Kruit

An experimental setup to prove the MAPPER electron lithography concept.
Conference paper (1999) - BJ Kampherbeek, MJJ Wieland, P. Kruit

An experimental setup to test the Mapper electron lithography concept.
Conference paper (1999) - BJ Kampherbeek, MJJ Wieland, A. Zuuk, P. Kruit