6 records found
1
Shot noise in electron-beam lithography and line-width measurements
Predicted effect of shot noise on contact hole dimension in e-beam lithography
Local critical dimension variation from shot-noise related line edge roughness
Shot noise in electron beam lithography and line width measurements
Fabrication and characterization of p-type silicon field-emitter arrays for lithography
Optimum dose for shot noise limited CD uniformity in E-beam lithography
