M.J.J. Wieland | TU Delft Repository

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M.J.J. Wieland

Journal article (3)

3 records found

1

MAPPER: high throughput maskless lithography

Journal article (2008) - E Slot (author) , M.J.J. Wieland (author) , G de Boer (author) , Pieter Kruit (author) , GF ten Berge (author)

Cathode Ray tube type electron gun as a source for multibeam electron lithography

Journal article (2007) - AJ van den Brom (author) , AHV van Veen, (author) , WM Weeda (author) , GZM Berglund (author) , M.J.J. Wieland (author) , P. Kruit (author)

Predicted effect of shot noise on contact hole dimension in e-beam lithography

Journal article (2006) - P Kruit (author) , S. Steenbrink (author) , M.J.J. Wieland (author)