M.J.J. Wieland | TU Delft Repository

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M.J.J. Wieland

Journal article (3)

3 records found

1

MAPPER: high throughput maskless lithography

Journal article (2008) - E Slot (author), M.J.J. Wieland (author), G de Boer (author), P. Kruit (author), GF ten Berge (author)

Cathode Ray tube type electron gun as a source for multibeam electron lithography

Journal article (2007) - AJ van den Brom (author), AHV van Veen, (author), WM Weeda (author), GZM Berglund (author), M.J.J. Wieland (author), P. Kruit (author)

Predicted effect of shot noise on contact hole dimension in e-beam lithography

Journal article (2006) - P. Kruit (author), S. Steenbrink (author), M.J.J. Wieland (author)