Cathode Ray tube type electron gun as a source for multibeam electron lithography

van den Brom, AJ; van Veen,, AHV; Weeda, WM; Berglund, GZM; Wieland, M.J.J.; Kruit, P.

Cathode Ray tube type electron gun as a source for multibeam electron lithography

Journal article (2007)

Authors

AJ van den Brom External organisation

AHV van Veen, External organisation

WM Weeda External organisation

GZM Berglund External organisation

M.J.J. Wieland External organisation

P. Kruit ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

To reference this document use:

http://resolver.tudelft.nl/uuid:c8df9a6d-07b8-4dc0-a087-77d0b6aab941

More Info

expand_more

Published Date

2007

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

ImPhys/Charged Particle Optics

No files available

Metadata only record. There are no files for this journal article.