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WM Weeda
Academic Work (1)
Journal article (1)
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Cathode Ray tube type electron gun as a source for multibeam electron lithography
Journal article (2007) -
AJ van den Brom (author)
,
AHV van Veen, (author)
,
WM Weeda (author)
,
GZM Berglund (author)
,
M.J.J. Wieland (author)
,
P. Kruit (author)
