Fabrication and characterization of p-type silicon field-emitter arrays for lithography

Journal article (2005)

Authors

TF Teepen ImPhys/Charged Particle Optics
H van 't Spijker External organisation
S. Steenbrink External organisation
A van Zuuk External organisation
C.T.H. Heerkens ImPhys/Charged Particle Optics
N van Druten External organisation
M Wieland External organisation
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2005

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics