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BJ Kampherbeek
Academic Work (7)
Conference paper (4)
Journal article (3)
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7 records found
1
Field emission photocathode array for high throughput lithography.
Conference paper (2001) -
AHV van Veen (author)
,
BJ Kampherbeek (author)
,
MJJ Wieland (author)
,
P. Kruit (author)
Field Emission Photocathode Arrray for multibeam electron lithography.
Journal article (2001) -
MJJ Wieland (author)
,
BJ Kampherbeek (author)
,
P Addessi (author)
,
P. Kruit (author)
Resolution of the multiple aperture pixel by pixel enhancement of resolution electron lithography concept.
Journal article (2000) -
BJ Kampherbeek (author)
,
MJJ Wieland (author)
,
P. Kruit (author)
An experimental setup to test the MAPPER electron lithography concept.
Journal article (2000) -
BJ Kampherbeek (author)
,
MJJ Wieland (author)
,
A. Zuuk (author)
,
P. Kruit (author)
An experimental setup to prove the MAPPER electron lithography concept.
Conference paper (1999) -
BJ Kampherbeek (author)
,
MJJ Wieland (author)
,
P. Kruit (author)
An experimental setup to proof the MAPPER electron lithography concept.
Conference paper (1999) -
BJ Kampherbeek (author)
,
MJJ Wieland (author)
,
P. Kruit (author)
An experimental setup to test the Mapper electron lithography concept.
Conference paper (1999) -
BJ Kampherbeek (author)
,
MJJ Wieland (author)
,
A. Zuuk (author)
,
P. Kruit (author)