An experimental setup to test the MAPPER electron lithography concept.

Kampherbeek, BJ; Wieland, MJJ; Zuuk, A.; Kruit, Pieter

An experimental setup to test the MAPPER electron lithography concept.

Journal article (2000)

Authors

BJ Kampherbeek ImPhys/Charged Particle Optics

MJJ Wieland ImPhys/Charged Particle Optics

A. Zuuk QN/Kavli Nanolab Delft -

Pieter Kruit ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

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Published Date

2000

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Research Group

ImPhys/Charged Particle Optics