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K
KJ Kuijlaars
8 records found
1
Authored
Multi-Scale modeling of chemical vapor deposition processes for thin film technology
Journal article (2007) -
C.R. Kleijn
,
R Dorsman
,
KJ Kuijlaars
,
M Okkerse
,
H van Santen
Some recent developments in chemical vapor deposition process and equipment modelling.
Journal article (1999) -
C.R. Kleijn
,
KJ Kuijlaars
,
M Okkerse-Ruitenberg
,
H van Santen
,
H.E.A. van den Akker
Simulation of selective tungsten chemical vapour deposition (a section of Solid State Electronics)
Journal article (1998) -
KJ Kuijlaars
,
C.R. Kleijn
,
H.E.A. van den Akker
Transient Simulations of selective Chemical Vapour Deposition of Tungsten using Phoenics-CVD
Journal article (1997) -
KJ Kuijlaars
,
C.R. Kleijn
,
H.E.A. van den Akker
Modeling of selective tungsten LPCVD
Journal article (1996) -
KJ Kuijlaars
,
C.R. Kleijn
,
H.E.A. van den Akker
Design and scale-up of chemical vapour deposition reactors for semiconductor processing
Journal article (1996) -
C.R. Kleijn
,
KJ Kuijlaars
,
H.E.A. van den Akker
Modeling of blanket and selective tungsten LPCVD
Conference paper (1996) -
KJ Kuijlaars
,
C.R. Kleijn
,
H.E.A. van den Akker
,
TGM Oosterlaken
,
G.C.A.M. Janssen
Detailed modeling of chemistry and transport phenomena in CVD reactors
Doctoral thesis (1996) -
KJ Kuijlaars
