KJ Kuijlaars | TU Delft Repository

K

KJ Kuijlaars

Conference paper (1)

Doctoral thesis (1)

Journal article (6)

8 records found

1

Multi-Scale modeling of chemical vapor deposition processes for thin film technology

Journal article (2007) - C.R. Kleijn (author), R Dorsman (author), KJ Kuijlaars (author), M Okkerse (author), H van Santen (author)

Some recent developments in chemical vapor deposition process and equipment modelling.

Journal article (1999) - C.R. Kleijn (author), KJ Kuijlaars (author), M Okkerse-Ruitenberg (author), H van Santen (author), H.E.A. van den Akker (author)

Simulation of selective tungsten chemical vapour deposition (a section of Solid State Electronics)

Journal article (1998) - KJ Kuijlaars (author), C.R. Kleijn (author), H.E.A. van den Akker (author)

Transient Simulations of selective Chemical Vapour Deposition of Tungsten using Phoenics-CVD

Journal article (1997) - KJ Kuijlaars (author), C.R. Kleijn (author), H.E.A. van den Akker (author)

Design and scale-up of chemical vapour deposition reactors for semiconductor processing

Journal article (1996) - C.R. Kleijn (author), KJ Kuijlaars (author), H.E.A. van den Akker (author)

Modeling of selective tungsten LPCVD

Journal article (1996) - KJ Kuijlaars (author), C.R. Kleijn (author), H.E.A. van den Akker (author)

Modeling of blanket and selective tungsten LPCVD

Conference paper (1996) - KJ Kuijlaars (author), C.R. Kleijn (author), H.E.A. van den Akker (author), TGM Oosterlaken (author), G.C.A.M. Janssen (author)

Detailed modeling of chemistry and transport phenomena in CVD reactors

Doctoral thesis (1996) - KJ Kuijlaars (author)