Design and scale-up of chemical vapour deposition reactors for semiconductor processing

Kleijn, C.R.; Kuijlaars, KJ; van den Akker, H.E.A.

Design and scale-up of chemical vapour deposition reactors for semiconductor processing

Journal article (1996)

Authors

C.R. Kleijn Old - sect Kramers Laboratory (MSP/FT)

KJ Kuijlaars Old - sect Kramers Laboratory (MSP/FT)

H.E.A. van den Akker Old - sect Kramers Laboratory (MSP/FT)

Research Group

Old - sect Kramers Laboratory (MSP/FT)

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Published Date

1996

Language

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Research Group

Old - sect Kramers Laboratory (MSP/FT)