Simulation of selective tungsten chemical vapour deposition (a section of Solid State Electronics)

Kuijlaars, KJ; Kleijn, C.R.; van den Akker, H.E.A.

Simulation of selective tungsten chemical vapour deposition (a section of Solid State Electronics)

Journal article (1998)

Authors

KJ Kuijlaars Old - sect Kramers Laboratory (MSP/FT)

C.R. Kleijn Old - sect Kramers Laboratory (MSP/FT)

H.E.A. van den Akker Old - sect Kramers Laboratory (MSP/FT)

Research Group

Old - sect Kramers Laboratory (MSP/FT)

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Published Date

1998

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Research Group

Old - sect Kramers Laboratory (MSP/FT)