Transient Simulations of selective Chemical Vapour Deposition of Tungsten using Phoenics-CVD

Kuijlaars, KJ; Kleijn, C.R.; van den Akker, H.E.A.

Transient Simulations of selective Chemical Vapour Deposition of Tungsten using Phoenics-CVD

Journal article (1997)

Authors

KJ Kuijlaars Old - sect Kramers Laboratory (MSP/FT)

C.R. Kleijn Old - sect Kramers Laboratory (MSP/FT)

H.E.A. van den Akker Old - sect Kramers Laboratory (MSP/FT)

Research Group

Old - sect Kramers Laboratory (MSP/FT)

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Published Date

1997

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Research Group

Old - sect Kramers Laboratory (MSP/FT)