KL Phan | TU Delft Repository

KP

KL Phan

Conference paper (1)

Journal article (1)

2 records found

1

Failure analysis of a thin-film nitride MEMS package

Journal article (2008) - Q Li (author), J.F.L. Goosen (author), JTM van Beek (author), A. van Keulen (author), KL Phan (author), Kouchi Zhang (author)

Hermeticity and thermal stability testing of PECVD silicon nitride thin-film packages

Conference paper (2008) - Q Li (author), J.F.L. Goosen (author), JTM van Beek (author), A. van Keulen (author), KL Phan (author), B. van Velzen (author), JJM Bontemps (author), JJ Koning (author), Kouchi Zhang (author)