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E Langereis
Academic Work (2)
Conference paper (2)
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2 records found
1
Low temperature deposition of TiN by plasma-assisted atomic layer deposition for system-in-package applications
Conference paper (2005) -
SBS Heil (author)
,
E Langereis (author)
,
F Roozeboom (author)
,
Pasqualina M Sarro (author)
,
MCM van de Sanden (author)
,
W. M.M. Kessels (author)
Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
Conference paper (2005) -
SBS Heil (author)
,
E Langereis (author)
,
F Roozeboom (author)
,
A Kemmeren (author)
,
NP Pham (author)
,
Pasqualina M Sarro (author)
,
MCM van de Sanden (author)
,
W. M.M. Kessels (author)
