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A Kemmeren
Academic Work (1)
Conference paper (1)
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Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
Conference paper (2005) -
SBS Heil (author)
,
E Langereis (author)
,
F Roozeboom (author)
,
A Kemmeren (author)
,
NP Pham (author)
,
Pasqualina M Sarro (author)
,
MCM van de Sanden (author)
,
WMM Kessels (author)
