Library
search
Press enter to search in title/abstract
in title/abstract
in authors
local_library
Repository
SH
SBS Heil
Academic Work (2)
Conference paper (2)
Sort by descending (newest to oldest)
Sort by ascending (oldest to newest)
2 records found
1
Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
Conference paper (2005) -
SBS Heil (author)
,
E Langereis (author)
,
F Roozeboom (author)
,
A Kemmeren (author)
,
NP Pham (author)
,
Pasqualina M Sarro (author)
,
MCM van de Sanden (author)
,
WMM Kessels (author)
Low temperature deposition of TiN by plasma-assisted atomic layer deposition for system-in-package applications
Conference paper (2005) -
SBS Heil (author)
,
E Langereis (author)
,
F Roozeboom (author)
,
Pasqualina M Sarro (author)
,
MCM van de Sanden (author)
,
WMM Kessels (author)
