AP

A. Polo

14 records found

Authored

Adaptive Optics for EUV Lithography. Phase Retrieval for Wavefront Metrology
Doctoral thesis (2014) - A. Polo

Wavefront reconstruction using intensity measurements for real-time adaptive optics

Predictive control of thermally inducted wavefront aberrations

Iterative learning control of a membrane deformable mirror for optimal wavefront correction

Theoretical analysis for best defocus measurement plane for robust phase retrieval.
Journal article (2013) - A. Polo, S.F. Pereira, Paul Urbach

Linear phase retrieval for real-time adaptive optics

Identification of a dynamical model of a thermally actuated deformable mirror

Robustness analysis of non-linear phase retrieval from single intensity measurement
Journal article (2013) - A. Polo, S.F. Pereira, Paul Urbach

Subaperture phase reconstruction from a Hartmann wavefront sensor by phase retrieval method for application in EUV adaptive optics
Conference paper (2012) - A. Polo, N van Marrewijk, S.F. Pereira, Paul Urbach

Determination of wavefront structure for a Hartmann Wavefront Sensor using a phase-retrieval method
Journal article (2012) - A. Polo, V Kutchoukov, F. Bociort

Terahertz wavefronts measured using the Hartmann sensor principle
Journal article (2012) - M. Cui, J.N. Hovenier, Y. Ren, A. Polo, J.R. Gao

An innovative and efficient method to control the shape of push-pull membrance deformable mirror

Wavefront Measurement for EUV Lithography System through Hartmann Sensor
Journal article (2011) - A. Polo, F. Bociort, S.F. Pereira, Paul Urbach

Non-interferometric wavefront sensing technique for EUV Lithography system
Conference paper (2010) - A. Polo, F. Bociort, S.F. Pereira, Paul Urbach