Wavefront reconstruction using intensity measurements for real-time adaptive optics

Adaptive Optics for EUV Lithography. Phase Retrieval for Wavefront Metrology

Identification of a dynamical model of a thermally actuated deformable mirror

Robustness analysis of non-linear phase retrieval from single intensity measurement

Linear phase retrieval for real-time adaptive optics

Theoretical analysis for best defocus measurement plane for robust phase retrieval.

Predictive control of thermally inducted wavefront aberrations

Iterative learning control of a membrane deformable mirror for optimal wavefront correction

Determination of wavefront structure for a Hartmann Wavefront Sensor using a phase-retrieval method

Subaperture phase reconstruction from a Hartmann wavefront sensor by phase retrieval method for application in EUV adaptive optics

Terahertz wavefronts measured using the Hartmann sensor principle

An innovative and efficient method to control the shape of push-pull membrance deformable mirror

Wavefront Measurement for EUV Lithography System through Hartmann Sensor

Non-interferometric wavefront sensing technique for EUV Lithography system