FB

F. Bociort

73 records found

Authored

Correction of the phse retardation caused by intrinsic birefringence in dep UV-Lithography
Journal article (2005) - A Serebriakov, F. Bociort, J.J.M. Braat

Saddle point in the merit function landscape of lithographic objectives
Journal article (2005) - OE Marinescu, F. Bociort, J.J.M. Braat

Networks of local minima in optical system optimization
Journal article (2004) - F. Bociort, E van Driel, A Serebriakov

Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces
Journal article (2004) - OE Marinescu, F. Bociort, J.J.M. Braat

The effect of intrinsic birefringence in deep UV-lithography
Journal article (2004) - A Serebriakov, E. Maksimov, F. Bociort, J.J.M. Braat

Topography of the merit function landscape in optical system design
Journal article (2004) - E van Driel, F. Bociort, A Serebriakov

Saddle points in the merit function landscape of systems of thin lenses in contact
Journal article (2004) - F. Bociort, A Serebriakov, M van Turnhout

Analysis search and classification for reflective ring-field projection systems
Journal article (2003) - MF Bal, F. Bociort, J.J.M. Braat

Chapter: Optical System Optimization
Book chapter (2003) - F. Bociort

Compensation of the birefringence induced by spartial dispersion in 157 nm
Conference paper (2003) - A Serebriakov, F. Bociort, J.J.M. Braat

Network structure of the set of local minima in optical system optimization
Journal article (2003) - F. Bociort, E van Driel, A Serebriakov

Topography of merit function landscape in optical system design
Journal article (2003) - E van Driel, F. Bociort, A Serebriakov

Optical system optimization based on the network structure of local minima
Conference paper (2003) - A Serebriakov, F. Bociort, J.J.M. Braat

Design of lithographic objectives including the effect of spatially induced birefringence
Journal article (2003) - A Serebriakov, E. Maksimov, F. Bociort, J.J.M. Braat

Spatial dispersion of crystals as a critical problem for deep UV lithography
Journal article (2003) - A Serebriakov, F. Bociort, J.J.M. Braat

Influence of Multilayers on the optical Performance of Extreme Ultra Violet Projection Systems.
Conference paper (2002) - MF Bal, F. Bociort, J.J.M. Braat

The effect of obstructions on the design of reflective ring-field projection systems.
Conference paper (2001) - MF Bal, F. Bociort, J.J.M. Braat

Systematic analysis of unobscured mirror systems for microlithography.
Conference paper (2000) - F. Bociort, MF Bal, J.J.M. Braat

Primary aberration coefficients for axial gradient-index lenses.
Conference paper (1999) - F. Bociort

Aberration balance in error function calculated analytically.
Conference paper (1998) - F. Bociort