AH

A. Haber

17 records found

Sparse solution of the Lyapunov equation for large-scale interconnected systems

Framework to trade optimality for local processing in large-scale wavefront reconstruction problems

Sparse approximate inverses of Gramians and impulse response matrices of large-scale interconnected systems

Estimation and control of large-scale systems with an application to adaptive optics for EUV lithography

Subspace identification of large-scale interconnected systems

Linear phase retrieval for real-time adaptive optics

Iterative learning control of a membrane deformable mirror for optimal wavefront correction

Predictive control of thermally inducted wavefront aberrations

Identification of a dynamical model of a thermally actuated deformable mirror

Moving horizon estimation for large-scale interconnected systems

Closed loop thermal control of a lithographic optical component

An innovative and efficient method to control the shape of push-pull membrance deformable mirror

Linear computational complexity design of constrained optimal ILC

Closed loop thermal control of a lithographic optical component
In EUV lithography the high throughput and high absorption can cause thermal deformation of the mirrors, which induces image distortion. In a previous paper [1] we have presented an actuation mechanism that is suitable to compensate and correct for these thermal aberrations. In t ...

Linear computational complexity design of constrained optimal ILC

Fast and robust iterative learning control for lifted systems

Subspace identification of spatially distributed systems