26 records found
1
Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
Time based micro-g accelerometer with improved damper geometry
Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping
Improved damper geometry for parallel-plate MEMS
Optimized settling of under-damped electrostatic actuators based on input shaping
Read-out calibration of a SOI capacitive transducer using the pull-in voltage
Damping of electrostatic actuators operated at low air pressure using input shaping
Full-gap positioning of parallel-plate electrostatic MEMS using on-off control
Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
A feedback operated tunable accelerometer: Analysis and design
A test mechanism for device diagnostics and process characterization
Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage
Squeezed-film damping measurements at constant knudsen numbers (U-SP-2-I-ICT)
Experimental verification of Rarefied Gas Squeezed-Film Damping Models used in MEMS (U-SP-2-I-ICT)
On-off control for full-gap positioning of parallel-plate electrostatic MEMS (U-SP-2-I-ICT)
Pull-In Time Based High Sensitivity Accelermeter With Adjustable Rane and Resolution (U-SP-2-I-ICT)
Rarefied gas squeezed-film damping measurements at constant knudsen numbers (U-SP-2-I-ICT)
