Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

Conference paper (2009)

Authors

L Mol Electronic Instrumentation
LA Rocha Electronic Instrumentation
E Cretu External organisation
Reinoud F. Wolffenbuttel Electronic Instrumentation
Research Group
Electronic Instrumentation
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Published Date

2009

Language

Undefined/Unknown

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Research Group

Electronic Instrumentation

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