Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics

Rocha, LA; Mol, L; Cretu, E; Wolffenbuttel, R.F.; Machado da silva, J

Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics

Conference paper (2007)

Authors

LA Rocha Electronic Instrumentation -

L Mol Electronic Instrumentation -

E Cretu External organisation

R.F. Wolffenbuttel Electronic Instrumentation -

J Machado da silva External organisation

Research Group

Electronic Instrumentation () (TU Delft)

Elektrotechniek Techniek

To reference this document use:

http://resolver.tudelft.nl/uuid:b0f43484-61ed-4054-bb2c-cdbc54d8adf0

More Info

expand_more

Published Date

2007

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation