Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

Journal article (2011)

Authors

LA Machado da Rocha External organisation
RA Dias External organisation
E Cretu External organisation
L Mol Electronic Instrumentation
RF Wolffenbuttel Electronic Instrumentation
Research Group
Electronic Instrumentation
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Published Date

2011

Language

English

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Research Group

Electronic Instrumentation

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