On-off control for full-gap positioning of parallel-plate electrostatic MEMS (U-SP-2-I-ICT)

Conference paper (2006)

Authors

L Mol Electronic Instrumentation
Reinoud F. Wolffenbuttel Electronic Instrumentation
LA Rocha Electronic Instrumentation
E Cretu External organisation
Research Group
Electronic Instrumentation
More Info
expand_more

Published Date

2006

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Instrumentation

No files available

Metadata only record. There are no files for this conference paper.