Growth stress in tungsten carbide-diamond like carbon coatings

Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips tp single crystal silicon wafers

Hardness of and stress in tungsten carbide-diamond like carbon multilayer coatings

Elastic deformation of silicon (001) wafers due to thin film stresses

Stress in tungsten carbide-diamond like carbon multilayer coatings

Density, stress, hardness and reduced Young's modulus of W-C:H coatings