Elastic deformation of silicon (001) wafers due to thin film stresses

Janssen, G.C.A.M.; Pujada Bermudez, BR

Elastic deformation of silicon (001) wafers due to thin film stresses

Journal article (2007)

Authors

G.C.A.M. Janssen OLD Surface and Interface Engineering

BR Pujada Bermudez OLD Surface and Interface Engineering

Research Group

OLD Surface and Interface Engineering

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Published Date

2007

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Research Group

OLD Surface and Interface Engineering

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