Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips tp single crystal silicon wafers

Janssen, GCAM; Abdalla, M.M.; van Keulen, Fred; Pujada Bermudez, BR; van Venrooy, B

Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips tp single crystal silicon wafers

Journal article (2008)

Authors

GCAM Janssen OLD Surface and Interface Engineering

M.M. Abdalla OLD Aerospace Structures

Fred van Keulen Computational Design and Mechanics

BR Pujada Bermudez OLD Surface and Interface Engineering

B van Venrooy External organisation

Research Group

OLD Surface and Interface Engineering

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Published Date

2008

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Research Group

OLD Surface and Interface Engineering

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