Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane¿Part 2: Thermal property, and sensitivity

Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane¿Part 1. Optical absorptivity

Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane-part 2.Thermal property and sensitivity

Thermal property of LPCVD SiN membrane for far infrared sensor application

Optical and thermal properties investigation of Si-rich nitride membrane for bio-inspired far infrared sensor applications

Performance of miniaturized LPCVD-SiN-membrane-based 7-14 micrometer infrared thermal detector:analytical,modelling and experimental study

Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application

Optical absorptivity and thermal property of LPCVD-deposited low-stress Si-rich nitride membrane for far-infrared sensor

Short progress status report bio-inspired MEMS far-infrared sensor for night vision application