Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application

Conference paper (2008)

Authors

DHB Wicaksono Electronic Instrumentation
F jutzi External organisation
G Pandraud Electronic Instrumentation
Paddy French Electronic Instrumentation
Research Group
Electronic Instrumentation
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Electronic Instrumentation