Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane¿Part 2: Thermal property, and sensitivity

Journal article (2009)

Authors

F jutzi External organisation
DHB Wicaksono Electronic Instrumentation
G Pandraud Electronic Components, Technology and Materials
N de rooij External organisation
P. J. French Electronic Instrumentation
Research Group
Electronic Instrumentation
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Published Date

2009

Language

Undefined/Unknown

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Research Group

Electronic Instrumentation