Optical and thermal properties investigation of Si-rich nitride membrane for bio-inspired far infrared sensor applications

Wicaksono, DHB; jutzi, F; Pandraud, G; de Rooij, NF; French, P.J.

Optical and thermal properties investigation of Si-rich nitride membrane for bio-inspired far infrared sensor applications

Conference paper (2008)

Authors

DHB Wicaksono Electronic Instrumentation

F jutzi External organisation

G Pandraud Electronic Instrumentation

NF de Rooij External organisation

P.J. French Electronic Instrumentation

Research Group

Electronic Instrumentation

Conference contrib. non-refer.

To reference this document use:

http://resolver.tudelft.nl/uuid:cd87ca03-083c-466f-8504-ddb1b109a347

More Info

expand_more

Published Date

2008

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Instrumentation

No files available

Metadata only record. There are no files for this conference paper.