Integrated Digital and Analog Circuit Blocks in a Scalable Silicon Carbide CMOS Technology

Journal article (2022)

Authors

J. Romijn Electronic Components, Technology and Materials -

S. Vollebregt Electronic Components, Technology and Materials -

L.M. Middelburg Electronic Components, Technology and Materials -

B. el Mansouri Electronic Components, Technology and Materials -

H.W. van Zeijl Electronic Components, Technology and Materials -

Alexander May Fraunhofer Institute for Integrated Systems and Devices Technology IISB

Tobias Erlbacher Fraunhofer Institute for Integrated Systems and Devices Technology IISB

Kouchi Zhang Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

DOI: https://doi.org/10.1109/TED.2021.3125279

Silicon carbide 4H-SiC Integrated SiC electronics Silicon carbide CMOS Wide bandgap

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Published Date

2022

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

The wide bandgap of silicon carbide (SiC) has attracted a large interest over the past years in many research fields, such as power electronics, high operation temperature circuits, harsh environmental sensing, and more. To facilitate research on complex integrated SiC circuits, ensure reproducibility, and cut down cost, the availability of a low-voltage SiC technology for integrated circuits is of paramount importance. Here, we report on a scalable and open state-of-the-art SiC CMOS technology that addresses this need. An overview of technology parameters, including MOSFET threshold voltage, subthreshold slope, slope factor, and process transconductance, is reported. Conventional integrated digital and analog circuits, ranging from inverters to a 2-bit analog-to-digital converter, are reported. First yield predictions for both analog and digital circuits show great potential for increasing the amount of integrated devices in future applications.

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- Embargo expired in 01-07-2022