Prediction of back-end process-induced wafer warpage and experimental verification

Conference paper (2002)

Authors

RBR van Silfhout External organisation
WD van Driel External organisation
Y Li (OLD) CITG Section Structural Mechanics (<2005)
GQ Zhang External organisation
L.J. Ernst Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
(OLD) CITG Section Structural Mechanics (<2005)
More Info
expand_more

Published Date

2002

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

(OLD) CITG Section Structural Mechanics (<2005)