An Experimental-Numerical Study of Metal Peel Off in Cu/low-k Back-End Structures

Kregting, René; van Silfhout, RBR; van der Sluis, O; Engelen, RAB; van Driel, WD; Zhang, Guo Qi Z

An Experimental-Numerical Study of Metal Peel Off in Cu/low-k Back-End Structures

Conference paper (2006)

Authors

René Kregting External organisation

RBR van Silfhout External organisation

O van der Sluis Computational Design and Mechanics

RAB Engelen External organisation

WD van Driel Dynamics of Micro and Nano Systems

Guo Qi Z Zhang Computational Design and Mechanics

Research Group

Computational Design and Mechanics

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Published Date

2006

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Research Group

Computational Design and Mechanics

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