An Experimental-Numerical Study of Metal Peel Off in Cu/low-k Back-End Structures

Conference paper (2006)

Authors

R Kregting External organisation
RBR van Silfhout External organisation
O van der Sluis Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
RAB Engelen External organisation
W.D. van Driel Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Kouchi Zhang Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2006

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics